Questions about sputter etch and plasma ashers, ionizing gasses with 13.56Mhz

Thread Starter

k7elp60

Joined Nov 4, 2008
562
I would like to know more about sputter etch and how this unlicensed frequency is used for the subject.
Thanks
 

BR-549

Joined Sep 22, 2013
4,938
You or industry can used any non licensed frequency, to do whatever you want.

UNLESS you transmit or interfere. Transmission from an antenna above a certain power level has to be licensed. Interference must be stopped.
 

nsaspook

Joined Aug 27, 2009
7,355
http://www.introductiontorife.com/refandres/files/papers_articles/RF Excited Plasmas.pdf

ISM band frequencies are used in uncountable industrial applications. It's not uncommon to use tens of kilowatts for some applications. A typical application in my area would be in RF Linacs. Each accelerator resonator would have its own phase locked amp of several thousand watts at 13.56Mhz for a total acceleration potential of several MeV.
http://forum.allaboutcircuits.com/threads/picture-this.110947/#post-858188
 

Thread Starter

k7elp60

Joined Nov 4, 2008
562
Thanking you all for your comments. I think I understand what has been said. At present I am working with a scientific individual who believes that this frequency, 13.56Mhz can be used to seperate the water into it's two gasses. I am having no trouble with the frequency generation or a reasonable power level. The means how to feed the energy to the water I don't know.
 
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