what is the differences in manufacturing processes used for simple semiconductor devices and power devices

 

There doesn't have to be a difference.

A modern microprocessor uses a MOSFET to turn power on and off to individual cores, but the same process is used for the smallest transistor.

 

Probably one of the best resources on this topic is IEEE papers.

Also UC Berkley and Stanford and MITand I am sure some others have extensive
programs in fabrication technologies.

Regards, Dana.