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MEMS Temperature Sensor

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robertlee

Joined Mar 8, 2011
15
Is there anyone who is an expert in MEMS?
I need advice on LOW POWER MEMS design

To use the MEMS Capacitance senor or to use its Resonant Frequency as the input of a temperature sensor?

I can use a Transimpedance Oscillator with a DETF MEMS Resonator
 
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