MEMS Capacitive Pressure Sensors

Thread Starter

Matt@Circuits

Joined Mar 16, 2022
1
Hi everyone,
I need a few tips on the theory of operation of MEMS capacitive pressure sensors. I understand the physics behind the sensors but I can't find a lot of information on how the capacitance changes are actually measured, what measurement circuit is used, how the signal conditioning circuits look like etc. All the datasheets I looked at miss a detailed theory of operation section. Any information and pointers to literature I can study would be greatly appreciated! I am mostly interested in smd package MEMS pressure sensors that are commonly used in consumer electronics.
Many thanks for your help in advance!
 
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