Silvaco CVD simulation based on controlling the flux flow

Thread Starter


Joined Feb 5, 2019
Hi, I have a question about the Silvaco TCAD, I will appreciate it if someone helps me. Does it applicable to simulate CVD by controlling the flux flow of the reactants ( the most real way to simulate the CVD), instead of the topological method? I have reviewed the same thing for PVD in Victory.
Which CAD has this feature?