Hi great info - I think maybe one of the Silicon chemical formula is incorrect.
Si + 3HCl = SiHCl3 + H2
SiHCl3 + H2 = Si + 3HCl2
It appears that the second formula does not balance.
From this link, I found a formula that looks better to me:
http://wenku.baidu.com/view/4d54af43a8956bec0975e3aa.html?from=related
SiHCl3 + H2 = Si + 3HCl
Si + 3HCl = SiHCl3 + H2
SiHCl3 + H2 = Si + 3HCl2
It appears that the second formula does not balance.
From this link, I found a formula that looks better to me:
http://wenku.baidu.com/view/4d54af43a8956bec0975e3aa.html?from=related
SiHCl3 + H2 = Si + 3HCl