Hi,

Hopefully this is going to be pretty basic stuff for someone. I have a mechanically variable capacitor and to prevent electrode shorting, I have deposited a small amount of oxide on the side walls. For my Matlab model I need the equation for capacitance which takes this oxide into account. I can't seem to find a generic formula for capacitance of a parallel plate or comb capacitor with oxide on the side walls (not filling entire gap between electrodes). I need formulas for both geometries.

Thanks in advance!

Rachel

 

Do you know what the dielectric constant of the oxide is and how thick that layer is?
I doubt that it will have much of an effect.