How to find actual capacitance ?

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Bero

Joined Dec 17, 2014
6
Hey People

I have a very basic problem. The measurements on an interdigitated capacitor are made as 1-port measurements (one side connected to RF signal and other side of capacitor to ground), using VNA. I have four Z11 (or Zin) values of a interdigitated capacitor, for different frequencies.
They are:
0.045GHz Z= -2K -j*8K
10.033GHz Z = 0.76 -j*54
18.02GHz Z= 0.478 -j*12
40GHz Z= 60 + j*154

The model of the capacitor also has ESR and inductance as it is a transmission line for such high frequencies. Using these values, I have to find actual capacitance of the interdigitated capacitor. Can you please help me out with ideas ?
 
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