Pulsed DC supply

Thread Starter

matsci

Joined Feb 4, 2009
10
How is the project coming along?
Hi,
Hmmm, I will be working with it sometimes later as I am engaged in another work.
Anyway, I am stuck with something weird not with lock in amplifier but with pulsed DC power supply which I use to sputter metal target with Ar ions by magnetron sputtering technique.
I would like to sputter at about 3 amps current at 350 kHz /1.1 us. But when I go to 3 amps, the voltage is increasing tremendously and power supply switches off with the short circuit error. I tried at 2.5 amps too, same thing, the voltage keeps on increasing and its not good for my experiment as it is unstable and I would like analyse plasma ions with mass spec. :(
I cleaned the target and magnetron too and the vacuum is good enough like 7X10-7 mbar and Ar pressure during sputtering was 1.9X10-2 mbar. I have worked with same pressure before.
I dont know if its the right place to ask but if you have any idea, kindly share with me.
 
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