oxidation process

Thread Starter

vead

Joined Nov 24, 2011
629
silicon die oxide layer is formed on the surface of silicon wafer by the oxidation process
oxidation process
oxidation method
dry oxidation
wet oxidation


dry oxidation
Si+O2 -.> Sio2
wet oxidation
Si+2H2O -> Sio2+2H2

dry and wet oxidation are the type of thermal oxidation or thermal oxidation is different hings ?

what is post oxidation evaluation​
 
Top