oxidation process

Discussion in 'General Electronics Chat' started by vead, Jun 1, 2014.

  1. vead

    Thread Starter Well-Known Member

    Nov 24, 2011
    701
    11
    silicon die oxide layer is formed on the surface of silicon wafer by the oxidation process
    oxidation process
    oxidation method
    dry oxidation
    wet oxidation


    dry oxidation
    Si+O2 -.> Sio2
    wet oxidation
    Si+2H2O -> Sio2+2H2

    dry and wet oxidation are the type of thermal oxidation or thermal oxidation is different hings ?

    what is post oxidation evaluation ​
     
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