I have this semiconductor part which is failing for input leakage when that input is tied to ground.

What is the cause of this failure? I want to understand it?

Thanks

 

Could be many things. It's hard to answer without knowing more details. What's the device? Is it an IC? Discrete? CMOS? Bipolar? How big is the leakage current?

 

Its an IC and CMOS process.
The leakage is in uA range.

 

Again, you need to provide mode details. It's free to write, don't skimp on details. If you want others to help you, then you need to help them first. Describe what you know in as much details as possible.

What's the device? Part number? uA range can be from 1 to 999uA. There are many CMOS ICs out there with input leakage specifications of 10uA. Failing how? What's it in use for? Circuit?