Wafers handling robotics arms

Thread Starter

nok

Joined Jul 28, 2010
33
Hi to all the forum members, my questions for this tread are correlated to the robotics arms for wafers like the robotics arms that are in this website:
www.kensingtonlabs.com
1. why is so important to build very very accuracy robotics arms, Wafer Handling Systems , in the machines of semiconductors industry that arrive to 1 micro meter accuracy? in other words why the semiconductors industries invest a lot of money in research and development of very very accuracy robotics arms? and how it will make the chips for the CPU of the computers or smartphones better?
2. If the wafer that the robotics arm move was have 300 millimeters diameter and now the wafer diameter enlarge to 450 millimeters so the wafer became to be heavier and bigger so what need to change in the robotics arm for wafers with 300 millimeters diameters that it will continue to be very very accuracy also for wafers with 450 millimeters diameter?

I think, but I am not sure, maybe the answer can be correlated also to very very accuracy machines productions or Hard Disk Drivers that are also very very accuracy.
I also will be happy to receive from the forum members links to article websites or relevant books like from google books or relevant lectures like from youtube education that are correlated to these questions, thank you.
 

tindel

Joined Sep 16, 2012
936
The number one reason to turn to robotics in manufacturing of wafers (or anything high-tech really) is that humans are the number one contaminate! Humans put out many particles from their mouth and skin. Robots contribute far less contaminates into the process. Any contaminates from robotics can at least be mitigated, note that the robotic arms in your link were made out of stainless steel and hard plastics... which can be cleaned easily. Humans also emit organic contaminates. When I was a technician in a class 10 cleanroom we tested regularly for particles and organics... particles were always below 10 particles per cubic foot when humans wore the appropriate gear (bunny suit, full head gear, hepa filtered breathing apparatus)... organics always showed sulfur and methane... from human flatulence.
 
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