Hi, Could someone give me some basic idea or information
1. How to measure the capacitance of interdigitated metal electrode of
about 250 nm wide and 2 mm long on a silicon wafer, spacing between
the electrode is 250 nm which is bonded bonded to copper pads.
2. Is it possible to measure the capacitance with time delay ?
3. Is it possible to cross check with commercial capacitance of some
pico or nano fard ? how should circuit connection be made ?
4. What will be order of electric filed with respect to electrode ?
Will be grateful if you could enlighten me for better understanding. Thanks
1. How to measure the capacitance of interdigitated metal electrode of
about 250 nm wide and 2 mm long on a silicon wafer, spacing between
the electrode is 250 nm which is bonded bonded to copper pads.
2. Is it possible to measure the capacitance with time delay ?
3. Is it possible to cross check with commercial capacitance of some
pico or nano fard ? how should circuit connection be made ?
4. What will be order of electric filed with respect to electrode ?
Will be grateful if you could enlighten me for better understanding. Thanks
