Pulsed DC supply

Discussion in 'General Electronics Chat' started by matsci, Feb 11, 2009.

  1. matsci

    Thread Starter Member

    Feb 4, 2009
    Hmmm, I will be working with it sometimes later as I am engaged in another work.
    Anyway, I am stuck with something weird not with lock in amplifier but with pulsed DC power supply which I use to sputter metal target with Ar ions by magnetron sputtering technique.
    I would like to sputter at about 3 amps current at 350 kHz /1.1 us. But when I go to 3 amps, the voltage is increasing tremendously and power supply switches off with the short circuit error. I tried at 2.5 amps too, same thing, the voltage keeps on increasing and its not good for my experiment as it is unstable and I would like analyse plasma ions with mass spec. :(
    I cleaned the target and magnetron too and the vacuum is good enough like 7X10-7 mbar and Ar pressure during sputtering was 1.9X10-2 mbar. I have worked with same pressure before.
    I dont know if its the right place to ask but if you have any idea, kindly share with me.
  2. beenthere

    Retired Moderator

    Apr 20, 2004