oxidation process

Discussion in 'General Electronics Chat' started by vead, Jun 1, 2014.

  1. vead

    Thread Starter Active Member

    Nov 24, 2011
    621
    8
    silicon die oxide layer is formed on the surface of silicon wafer by the oxidation process
    oxidation process
    oxidation method
    dry oxidation
    wet oxidation


    dry oxidation
    Si+O2 -.> Sio2
    wet oxidation
    Si+2H2O -> Sio2+2H2

    dry and wet oxidation are the type of thermal oxidation or thermal oxidation is different hings ?

    what is post oxidation evaluation ​
     
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