I need you on my side the next time a VP asks why there was a scrap due to a equipment problem. Most of the higher energy machines (1MeV+) are capable of gamma radiation under the right conditions, they are shielded by thick lead plates that handle normal X-rays when in operation but under the right failure modes the software shuts down beam operations (I've seen it a few times) so we don't get cooked as gamma radiation will go through the lead shielding like tissue paper. Then there is the control of highly toxic dopants like Phosphine or Arsine. It's not a nuclear power plant but the potential for harm is real if we lose the control system interfaces but there are usually mechanical fail-safe systems like the big red EMO button that will kill the machine in an instant but still leave potential chemical hazards.
http://www.axcelis.com/sites/default/files/docs/axcelis_safetyconsiderationsimplanter.pdf
Interesting...
Looks like the list of N-type dopants is long. What are the typical P-type dopants?