Defects in dielectrics

Discussion in 'General Electronics Chat' started by Ferra, May 30, 2014.

  1. Ferra

    Thread Starter New Member

    May 30, 2014
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    0
    Hi all

    I'd like to know if there is any known range or distribution for the size of individual defects (traps) in high-k dielectrics?
     
  2. GopherT

    AAC Fanatic!

    Nov 23, 2012
    6,067
    3,837
    Are you talking about trenches and other features on the silicon? What deposition method?
     
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