hi all....what are the various factors that affect the value of Cgs in MOS. Is it technology dependent and/or any other factors too.... plz help me i this regard.....

Also what is the typical value of μn of electrons in MOS channel....what r the factors affecting it...

 

It is technology dependent. The factors are not straightforward, but if you want to know the details, I suggest obtaining a book on MOSFET device (which would have a typical value of u as well). Put simply, it depends on the size of the gate, oxide characteristics, Vth, Vgs, Vds, etc..